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MOS 9: Manufacturing of Optical Systems: Joint Session with SPIE 1: High-Precision Measurement of Optical Components and Systems
14:00 - 15:30
Session Chair: Christof Pruss, Institut für Technische Optik,University of Stuttgart
Location:Room 21, 2nd floor, ICM MOS
14:00 - 14:30 Invited
Light scattering characterization of high-performance optical components – influence of roughness, defects, and coatings
Fraunhofer Institute IOF, Jena, Germany
Even high-end optical components exhibit a certain level of imperfections such as roughness and defects which can be critical for the application. Aside from imperfections that are rather easily accessible and clearly linked to light scattering, there are other sources of scattering such as bulk inhomogeneities and interference effects in coatings which are more difficult to assess. Light scattering measurements can be used to detect relevant imperfections with high sensitivity and over large areas. Instruments for angle resolved light scattering measurements, including a compact robotic sensor, will be presented. Examples of light scattering studies of optical components for high-end applications like space optics and lithography optics will be discussed.
14:30 - 14:50
Combination of a fast white light interferometer with a phase shifting interferometric line sensor for form measurements of precision components
14:50 - 15:10
Wide-ranging roughness analysis of optical surfaces
Nadja Felde1,2, Luisa Coriand1, Sven Schröder1, Andreas Tünnermann1,2
1Fraunhofer Institute for Applied Optics and Precision Engineering, Jena, Germany; 2Friedrich-Schiller-University, Institute of Applied Physics, Jena, Germany
A reliable analysis of roughness of high-precision optical surfaces is indispensable in particular to control light scattering properties. It will be shown that a comprehensive assessment of roughness can be accomplished using Power Spectral Density functions. Instruments and data analysis methods are presented and compared.
15:10 - 15:30
Birefringence measurement in complex optical systems