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MOS7: Manufacturing of Optical Systems: Structured Surfaces
8:30 - 10:00
Session Chair: Olaf Dambon, Fraunhofer IPT
Location:Room 21, 2nd floor, ICM MOS
8:30 - 8:45 Invited
Scattering from reflective diffraction gratings: the challenges of requirement definition, simulation and verification
Andrea Monika Kroneberger
OHB System AG, Germany
In a spectrometer the scattering from reflective gratings is poorly understood and difficult to characterise, but contributes significantly to the overall system stray light and reduction in contrast.
Specification of the scattering from gratings is usually defined by comparison with the scatter due to the micro-roughness of smooth reflecting surfaces. However, the surface roughness of the grating is only one contributor to the BSDF.
For stray light simulation a BSDF has to be found that reproduces the measured scattering pattern of the grating while not increasing simulation time excessively.
This paper describes the approaches that will be taken to the fitting of BSDFs to existing data obtained during measurements of scattering from gratings.
8:45 - 9:00
e2®-PCGs: Efficiency Enhanced Pulse Compression Gratings for industrial applications
Ralf Müller, Markus Bender, Enrico Piechotka, Michael Klaus, Ulrich Süß, Maria Oliva
JENOPTIK Optical System GmbH, Germany
PCGs are key elements to enhance short-pulse laser performances. We present embedded large-area efficiency-enhanced fused silica gratings, suitable for industrial applications. The e2®-PCGs are binary transmission gratings with transmission effi-ciencies up to 99%, low wave-front error, and high laser induced damage threshold (LIDT).
9:00 - 9:15
High-order Suppression of Quasi-Triangle Array Transmission Gratings
1Institute of Microelectronics of Chinese Academy of Sciences, Key Laboratory of Microelectronics Devices & Integrated Technology , Beijing 100029, China; 2University of Chinese Academy of Sciences, Beijing 100049, China
We propose a binary grating based on a membrane to solve the overlapping in the spectrum measurement. By optimizing the shape, size and position of the holes, a self-standing single-order diffraction gratings have been achieved.
9:15 - 9:30
Zigzag grating with quasi-random array for single order diffraction
1Institute of Microelectronics of Chinese Academy of Sciences,Key Laboratory of Microelectronics Devices & Integrated Technology , Beijing 100029, China; 2University of Chinese Academy of Sciences, Beijing 100049, China
We present a novel quasi-random array of zigzag gratings for high order diffraction suppression in x-ray region. By optimizing the structure parameters with Kirchhoff’s diffraction theory, the 2 to 6 orders can be completely suppressed. This structure is of great practical importance, as it arises the precision of fabrication by avoiding the difficulty in acute angle, especially in nanofabrication. The novel grating offers an opportunity for high-accuracy spectral measurement and will possess broad potential applications in optical science and engineering fields.
9:30 - 9:45
Fluid jet polishing of structures surfaces
Rui Almeida, Rainer Börret, Jonas Raab, Max Schneckenburger, Marco Speich, Dominik Wiedemann
Aalen University, Germany
Fluid Jet Polishing (FJP) is a technology that uses a water based jet  as polishing tool. The advantages of Jet polishing are a very small tool function (spot), a possible stand-off distance of about 100 mm and a constant wear rate , . This work shows FJP for processing of structured metal moulds for plastic injection moulding.
9:45 - 10:00
Ablation of Fused Silica with high power Q-Switch CO2-Laser Radiation
Karsten Braun1, Christian Weingarten1, Edgar Willenborg1, André Temmler2
1Fraunhofer Institute for Laser Technology ILT, Germany; 2Chair for Laser Technology (LLT), RWTH Aachen University, Germany
A new Q-Switch pulsed CO2-laser with ns-pulses and high laser power is used for thermal ablation of glass material. Depending on the used process parameters 2.5D structures with high ablation rates up to 3 mm³/s and roughness’s down to Sa = 0,5 μm can be generated. After the ablation process the surface can be post processed via laser polishing and laser beam figuring to further reduce the roughness.