Conference Agenda

Overview and details of the sessions of this conference. Please select a date or location to show only sessions at that day or location. Please select a single session for detailed view (with abstracts and downloads if available).

Session Overview
MOS7: Manufacturing of Optical Systems: Structured Surfaces
Wednesday, 28/06/2017:
8:30 - 10:00

Session Chair: Olaf Dambon, Fraunhofer IPT
Location: Room 21, 2nd floor, ICM

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8:30 - 8:45

Scattering from reflective diffraction gratings: the challenges of requirement definition, simulation and verification

Andrea Monika Kroneberger

OHB System AG, Germany

In a spectrometer the scattering from reflective gratings is poorly understood and difficult to characterise, but contributes significantly to the overall system stray light and reduction in contrast.

Specification of the scattering from gratings is usually defined by comparison with the scatter due to the micro-roughness of smooth reflecting surfaces. However, the surface roughness of the grating is only one contributor to the BSDF.

For stray light simulation a BSDF has to be found that reproduces the measured scattering pattern of the grating while not increasing simulation time excessively.

This paper describes the approaches that will be taken to the fitting of BSDFs to existing data obtained during measurements of scattering from gratings.

8:45 - 9:00

e2®-PCGs: Efficiency Enhanced Pulse Compression Gratings for industrial applications

Ralf Müller, Markus Bender, Enrico Piechotka, Michael Klaus, Ulrich Süß, Maria Oliva

JENOPTIK Optical System GmbH, Germany

PCGs are key elements to enhance short-pulse laser performances. We present embedded large-area efficiency-enhanced fused silica gratings, suitable for industrial applications. The e2®-PCGs are binary transmission gratings with transmission effi-ciencies up to 99%, low wave-front error, and high laser induced damage threshold (LIDT).

9:00 - 9:15

High-order Suppression of Quasi-Triangle Array Transmission Gratings

Tanchao Pu1,2, Ziwei Liu1,2, Lina Shi1, Changqing Xie1

1Institute of Microelectronics of Chinese Academy of Sciences, Key Laboratory of Microelectronics Devices & Integrated Technology , Beijing 100029, China; 2University of Chinese Academy of Sciences, Beijing 100049, China

We propose a binary grating based on a membrane to solve the overlapping in the spectrum measurement. By optimizing the shape, size and position of the holes, a self-standing single-order diffraction gratings have been achieved.

9:15 - 9:30

Zigzag grating with quasi-random array for single order diffraction

Ziwei Liu1,2, Tanchao Pu1,2, Lina Shi1, Changqing Xie1

1Institute of Microelectronics of Chinese Academy of Sciences,Key Laboratory of Microelectronics Devices & Integrated Technology , Beijing 100029, China; 2University of Chinese Academy of Sciences, Beijing 100049, China

We present a novel quasi-random array of zigzag gratings for high order diffraction suppression in x-ray region. By optimizing the structure parameters with Kirchhoff’s diffraction theory, the 2 to 6 orders can be completely suppressed. This structure is of great practical importance, as it arises the precision of fabrication by avoiding the difficulty in acute angle, especially in nanofabrication. The novel grating offers an opportunity for high-accuracy spectral measurement and will possess broad potential applications in optical science and engineering fields.

9:30 - 9:45

Fluid jet polishing of structures surfaces

Rui Almeida, Rainer Börret, Jonas Raab, Max Schneckenburger, Marco Speich, Dominik Wiedemann

Aalen University, Germany

Fluid Jet Polishing (FJP) is a technology that uses a water based jet [1] as polishing tool. The advantages of Jet polishing are a very small tool function (spot), a possible stand-off distance of about 100 mm and a constant wear rate [2], [3]. This work shows FJP for processing of structured metal moulds for plastic injection moulding.

9:45 - 10:00

Ablation of Fused Silica with high power Q-Switch CO2-Laser Radiation

Karsten Braun1, Christian Weingarten1, Edgar Willenborg1, André Temmler2

1Fraunhofer Institute for Laser Technology ILT, Germany; 2Chair for Laser Technology (LLT), RWTH Aachen University, Germany

A new Q-Switch pulsed CO2-laser with ns-pulses and high laser power is used for thermal ablation of glass material. Depending on the used process parameters 2.5D structures with high ablation rates up to 3 mm³/s and roughness’s down to Sa = 0,5 μm can be generated. After the ablation process the surface can be post processed via laser polishing and laser beam figuring to further reduce the roughness.

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