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MOS5: Manufacturing of Optical Systems: EUV and X-Ray
10:30 - 12:00
Session Chair: Sven Schröder, Fraunhofer Institute IOF
Location:Room 21, 2nd floor, ICM MOS
10:30 - 10:45 Invited
Manufacturing and Industrialization of EUV Lithography Optics
Zeiss SMT, Germany
10:45 - 11:00 Invited
EUV-Komponenten und Systeme
optiX fab GmbH, Germany
11:00 - 11:15
Characterization of EUV optical components
Marcus Trost1, Matthias Hauptvogel1, Sven Schröder1, Robert Jende1, Ralf Steinkopf1, Stefan Risse1, Marco Perske2, Hagen Pauer2, Tobias Fiedler2, Torsten Feigl2
1Fraunhofer IOF, Germany; 2optiX fab GmbH, Germany
Optical components for the extreme ultraviolet (EUV) face stringent requirements for surface finish, because even lowest levels of residual imperfections can cause significant optical losses and impair image quality. Approaches to characterize these irregularities over extended areas by light scattering measurements will be discussed in this contribution.
11:15 - 11:30
The Development of Extreme Ultraviolet / Soft X-Ray Optical System at SKLAO
Chun-shui Jin, Li-ping Wang, Yao Xie, Bo Yu, Hui Wang, Jie Yu, Hai-tao Zhang, Yu Liu, Feng Zhou, Benyin Guo, Wei Huang
State Key Laboratory of Applied Optics(SKLAO), Changchun Institute of Optics, Fine Mechanics and Physics(CIOMP), Chinese Academy of Sciences(CAS)
An overview of recent development of the extreme ultraviolet (EUV)/soft X-ray optical system at SKLAO was presented. The testing and fabrication of aspheric mirrors, EUV/soft X-ray multilayer films, semi-kinematic mount, six-DOF precise adjustment platform, optical system alignment based on our homemade point diffraction interferometer (PDI) are discussed.
11:30 - 11:45
Two-color prime laser of subnanosecond pulses for EUV lithography
Aleksandr Zhevlakov1, Viktor Bespalov2, Ruben Seisyan3
1Vavilov State Optical Institute, Russian Federation; 2ITMO University, Russian Federation; 3Ioffe Physical-Technical Institute RAS, Russian Federation
Raman frequency conversion 30ps-pulses of Nd:YAG laser for amplification in three rotational transitions of CO2 molecules was studied. The effective SRS conversion in compressed hydrogen from range of 1.90....1.96 µm to 9.1....10.6 mkm is provided under narrow linewidth pumping of 0.1 cm-1 and beam divergence not worse ~0.2 mrad . Experimentally established that the addition of the rare gases in SRS medium allows to increase the output energy and to improve the parameters of the Stokes output beam at wavelength of 9.1...10.6 mkm. The use SRS convertors in powerfull CO2 laser decreases power consumption in primary source of EUV lithography.
11:45 - 12:00
Development of iridium coated silicon X-ray mirrors for Lobster Eye astronomical telescopes
Veronika Stehlikova1,2, Anne-Catherine Probst3, Ondrej Nentvich1, Martin Urban1, Adolf Inneman1,4, Ladislav Sieger1, Veronika Marsikova1,4, Thorsten Döhring3
1Czech Technical University in Prague, CZ-16636 Prague, Czech Republic; 2Max Planck Institute for Extraterrestrial Physik, Germany; 3Aschaffenburg University of Applied Sciences, D-63743 Aschaffenburg, Germany; 4Rigaku Innovative Technologies Europe, CZ-14221 Prague, Czech Republic
In the field of X-ray astronomy different types of telescope optics based on grazing incidence mirrors can be used. This contribution presents a special design of a Lobster Eye wide-field telescope with mirrors based on flat silicon wafers and the task of coating such mirror substrates with reflective iridium layers.