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MOS2: Manufacturing of Optical Systems: Fabrication 1
14:30 - 16:00
Session Chair: Oliver Fähnle, FISBA AG
Location:Room 21, 2nd floor, ICM MOS
14:30 - 14:45 Invited
The Impact of the Smartphone on the Polishing of Ultra Precision Surfaces
14:45 - 15:00
Figure error correction of aluminium mirrors by deterministic reactive ion-beam machining
Jens Bauer, Melanie Ulitschka, Frank Frost, Thomas Arnold
Leibniz-Institut für Oberflächenmodifizierung (IOM), Germany
Shape-adapted mirror optics made from standard Al alloys (e.g. Al6061) are highly interesting for short-wavelength applications, especially for utilization in EUV/XUV lithography, x-ray and synchrotron optics. Recently we presented a promising surface shaping technique based on reactive ion beam etching (RIBE) to overcome current surface roughening issues in conventional IBF processing. An extensive process model was elaborated. As a technological achievement, the surface roughness is preserved almost in its initial state during RIBE processing with oxygen or nitrogen gas. For ultra-precision figure error correction low-energy , narrow ion beams (< 1.5 keV, FWHM = 5 mm) are used in deterministic operation via a dwell-time approach. Machining examples are presented on diamond-turned Al surfaces made from RSA alloys Al6061 and Al905.
15:00 - 15:15
Influence of different materials in the polishing material removal of steel samples
Rui Pedro Almeida1, Rainer Börret1, David K. Harrison2, Anjali K.M. DeSilva2
1Aalen University, Germany; 2Glasgow Caledonian University, United Kingdom
To improve and control the surface finish of a steel mould, it is important to be able to keep the material removal constant during the polishing process of steel moulds. The aim of this work is to study the influence of different polishing materials on the material removal rate and its reproducibility during the polishing process of hardened steel.
15:15 - 15:30
Manufacturing high precision optical flats to λ/75 PV using MRF and SSI
Chris Maloney, Chris Supranowitz, Paul Dumas, Jean Pierre Lormeau
QED Technologies International Inc., United States of America
This paper describes a method for manufacturing high precision flats using Magnetorheological Finishing (MRF) and Subaperture Stitching Interferometry (SSI) technologies. The metrology techniques used include SSI to eliminate systematic errors and a simplified three-flat calibration for an absolute measurement of power. Using MRF, a flatness of λ/75 PV at 632.8nm was met on a fused silica flat.
15:30 - 15:45
Characteristics of Diamond Turned NiP Smoothed with Ion Beam Planarization
Yaguo Li1,3, Hideo Takino2, Frank Frost3
1Fine Optical Engineering Research Center, Chengdu 610041, China; 2Chiba Institute of Technology, Department of Mechanical Engineering, Chiba 275-0016, Japan; 3Leibniz Institute of Surface Modification, D-04318, Germany
The capability of ion beam planarization (IBP) to reduce surface roughness of diamond turned surfaces was investigated using NiP as an example. The reduction of roughness was analyzed with respect to different spatial wavelengths and amplitudes of turning marks. Additionally, the effect of multiple planarization steps was analyzed. It is shown that the spatial wavelength and depth of turning marks have only minor impact on the degree of surface roughness reduction. Using up to five IBP steps, the surface roughness can be reduced up to one order of magnitude. For the enhancement of IBP as a final surface finishing technology both the resist coating process and the properties of the planarizing layer need to be further improved.
15:45 - 16:00
Alternative technologies for asphere and freeform manufacturing
Thomas Arnold, Georg Böhm, Hendrik Paetzelt, Frank Frost
Leibniz Institute of Surface Modification, Germany
In order to meet the increasing requirements in the manufacturing of ultra-precision optical surface forms with non-standard geometries like aspheres and freeforms novel concepts for surface machining are partly needed. Atmospheric Plasma Jet Machining (PJM) with a local chemical etching process used for material removal has a great technological potential for the treatment of optical surfaces preferably made from fused silica, ULE®, silicon, or silicon carbide.
The current status of atmospheric plasma jet machining and selected examples are presented.