Conference Agenda

Device density in semiconductor chips continues to increase through many innovations. For example, high-NA EUV lithography enables the printing of smaller features that allow more devices in a smaller area. In addition, many innovations are taking place in the area of 3D device integration where devices are stacked on each other.
Manufacturing state-of-the-art chips with sufficient yield requires good control of many process steps during manufacturing. Overlay, for example, is a critical parameter in chip manufacturing. Overlay describes the lateral mis-alignment between 2 overlapping layers in a device. Any misalignment (=overlay error) can result in significant yield loss and overlay must therefore be controlled to the 1 nm level. These levels of control need accurate and robust overlay metrology.
Overlay is often measured on dedicated targets using optical microscopy. However, robustly achieving sub-nanometer precision requires near-perfect microscopic imaging conditions which drives the need for high-quality imaging optics with very low aberration levels. Technically this is possible, but it leads to complex and costly optical imaging systems. In order to keep metrology costs to acceptable levels there is a need for a microscopy approach that achieves the sub-nanometer precision levels in a more cost-efficient way.

Read more: Plenary Speakers

EOS celebrates distinguished members of the society with one of the highest categories of membership of the EOS: the Fellowship.

Optical frequency combs have revolutionized time and frequency metrology by providing rulers in frequency space that measure large optical frequency differences and/or straightforwardly link microwave and optical frequencies. Such combs enable precision laser spectroscopy, tests of fundamental physics and provide the long-missing clockwork mechanism for optical clocks.

While frequency combs have become key to research areas such as attosecond science, or calibration of astronomical spectrographs, one of the most successful applications beyond their original purpose has been dual-comb interferometry. An interferometer can be formed using two frequency combs of slightly different line spacing. Dual-comb interferometers without moving parts are fundamentally different from any other type of interferometers: they perform direct frequency measurements, without geometric limitations to resolution. They outperform state-of-the-art devices in an increasing number of fields including spectroscopy and three-dimensional imaging, offering unique features such as frequency measurements, accuracy, precision, speed. This talk will provide a short introduction to optical frequency combs and will survey dual-comb interferometry and its latest exciting developments.

Read more:Plenary Speakers

The session organized by the European Optical Society (EOS) and the Chinese Optical Society (COS) is intended to promote international cooperation and knowledge-sharing between Chinese and European researchers. The session will showcase speakers from EU and China with professional experience in both frameworks.

Chairs: Xu Liu (COS) and Remo Proietti Zaccaria (EOS)

Read more: EOS–COS Session

Join us in the greenery of Delft for a relaxed buffet dinner at the Art Centre Delft  — an off-site evening designed for informal networking in a beatiful natural setting.

Separate registration required.
Bring your badge!

Buses will take us from the TU Aula congress center to this dinner venue inside a nature reserve, for a relaxed get-together at the Art Centre Delft. 
Buses will also bring us back to TU Aula congress center at the end of the evening.