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1Silicon Austria Labs GmbH, Austria; 2Ecole Polytehcnique Fédérale de Lausanne, Switzerland; 3The University of Sydney, Australia
Thin film aluminum nitride on insulator (AlNOI) has gained attention as a promising material platform for integrated photonic circuits (PICs) due to its ability to operate over a wide spectral range covering the ultra-violet to mid-infrared regions, while enabling a broad range of passive photonic functionalities. This study aims to optimize sputtered AlNOI films for PICs, with an emphasis on the spectroscopic ellipsometry study over a range from 0.19 µm to 25 µm. Furthermore, we discuss our approach for fabricating AlNOI PICs components, with a particular focus on optimizing the etching process to attain smooth sidewall waveguides.
9:15am - 9:30am ID: 420 / TOM1 S03: 3 TOM 1 Silicon Photonics and Integrated Optics
Near-infrared photodetectors based on embedded graphene
Teresa Crisci1, Piera Maccagnani2, Luigi Moretti3, Caterina Summonte2, Mariano Gioffrè1, Rita Rizzoli2, Mario Medugno1, Mario Iodice1, Giuseppe Coppola1, Maurizio Casalino1
1Institute of Applied Science and Intelligent Systems “Eduardo Caianiello” (CNR); 2Institute for Microelectronics and Microsystems (CNR); 3University of Campania "Luigi Vanvitelli"
In last years, the introduction of 2-dimensional materials such as graphene has revolutionized the world of silicon photonics. In this work, we demonstrate a new approach for integrating graphene into silicon-based photodetectors. We leverage a thin film of hydrogenated amorphous silicon to embed the graphene within two different photonic structures, an optical Fabry-Perot microcavity, and a waveguide, achieving a stronger light-matter interaction. The investigated devices have shown promising performance resulting in responsivities as high as 27 mA/W and 0.15 A/W around 1550 nm, respectively.
9:30am - 10:00am Invited ID: 240 / TOM1 S03: 4 TOM 1 Silicon Photonics and Integrated Optics
Advancements in waveguide architectures using high-performance silica-on-silicon platform
Serge Bidnyk, Ksenia Yadav, Ashok Balakrishnan
Enablence Technologies Inc., Canada
Novel applications in optical coherence tomography (OCT) and LiDAR systems have become possible due to performance characteristics of a state-of-the-art silica-on-silicon planar lightwave circuit (PLC) platform. We have achieved ultra-low propagation losses of <0.009 dB/cm with unmatched phase control in a polarization-insensitive way, enabling a range of real-time advanced vision and imaging applications utilizing k-clocks and analog frequency sampling architectures.
10:00am - 10:30am Invited ID: 531 / TOM1 S03: 5 TOM 1 Silicon Photonics and Integrated Optics
Development of 905nm SiN-based integrated optical phased arrays for LIDAR
Daivid Fowler
CEA-Leti, France
We describe a selection of work carried out within the ECSEL-VIZTA European research project concerning the development of an integrated solid-state 905nm time-of-flight (TOF) LIDAR device. Pseudo two-dimensional, single wavelength beam steering from a 7x32 channel silicon nitride-based optical phased array was achieved, with optimized single-pass thermo-optic phase shifters with Pπ = 30mW. Direct optical coupling of a photonic chip to a 7 W tapered GaInAsP laser diode is also shown to suggest a pathway to achieving medium-to long-range integrated LIDAR using a low-cost light source.
